Semiconductor fabrication : technology and metrology /
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| Hovedforfatter: | |
|---|---|
| Andre forfattere: | |
| Format: | Bog |
| Sprog: | engelsk |
| Udgivet: |
Philadelphia :
ASTM,
c1989.
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| Fag: | |
| Online adgang: | Contributor biographical information Publisher description Table of contents |
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Lignende værker: Semiconductor fabrication :
- Fundamentals of semiconductor fabrication /
- The science and engineering of microelectronic fabrication /
- The science and engineering of microelectronic fabrication /
- Emerging semiconductor technology : a symposium /
- Semiconductor Devices : Modelling and Technology /
- Semiconductor devices, physics and technology /