Gupta Dinesh C. & Sze, S. M. (1989). Semiconductor fabrication: Technology and metrology. ASTM.
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芝加哥风格引文
Gupta Dinesh C. 与 S. M. Sze. Semiconductor Fabrication: Technology and Metrology. Philadelphia: ASTM, 1989.
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MLA引文
Gupta Dinesh C. 与 S. M. Sze. Semiconductor Fabrication: Technology and Metrology. ASTM, 1989.
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